Three-dimensionally stretchable single crystalline semiconductor membrane

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United States of America Patent

PATENT NO 11697889
APP PUB NO 20200123677A1
SERIAL NO

16719088

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Abstract

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A structure including a three-dimensionally stretchable single crystalline semiconductor membrane located on a substrate is provided. The structure is formed by providing a three-dimensional (3D) wavy silicon germanium alloy layer on a silicon handler substrate. A single crystalline semiconductor material membrane is then formed on a physically exposed surface of the 3D wavy silicon germanium alloy layer. A substrate is then formed on a physically exposed surface of the single crystalline semiconductor material membrane. The 3D wavy silicon germanium alloy layer and the silicon handler substrate are thereafter removed providing the structure.

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Patent Owner(s)

  • INTERNATIONAL BUSINESS MACHINE CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Balakrishnan, Karthik Scarsdale, US 335 2045
Bedell, Stephen W Wappingers Falls, US 409 5572
Fogel, Keith E Hopewell Junction, US 270 4170
Hashemi, Pouya Purchase, US 600 4505
Hekmatshoartabari, Bahman White Plains, US 390 1820
Reznicek, Alexander Troy, US 1413 11253

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