System for processing a workpiece
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United States of America Patent
Stats
-
Dec 17, 2002
Grant Date -
Dec 20, 2001
app pub date -
Aug 2, 2001
filing date -
Mar 13, 1998
priority date (Note) -
In Force
status (Latency Note)
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Abstract
An apparatus for processing a workpiece in a micro-environment includes a workpiece housing connected to a motor for rotation. The workpiece housing forms a substantially closed processing chamber where processing fluids are distributed across at least one face of the workpiece by centrifugal force generated during rotation of the housing. The housing may also be detached from the motor and moved to another location. The housing consequently serves as a processing chamber, as well as a storage or transport chamber.
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