Desorption processing for flat panel display
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United States of America Patent
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-
Jun 1, 2004
Grant Date -
Oct 3, 2002
app pub date -
Mar 31, 2001
filing date -
Mar 31, 2001
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
By desorption processing of a flat panel display in a vacuum before hermetic sealing, it is possible to reduce operational outgassing. The first embodiment involves plasma scrubbing, the second embodiment involves electron irradiation pre-aging, and the third embodiment involves electron irradiation pre-aging of the faceplate in an evacuation process.
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