Vacuum evaporation system for deposition of thin films
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United States of America Patent
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-
Apr 19, 1983
Grant Date -
N/A
app pub date -
Sep 3, 1981
filing date -
Sep 17, 1980
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A blower and a dust collector are communicated through valves with an evacuated process chamber in which are disposed one or more sets of a film-substrate holder and an evaporation source in such a way that the blower, the dust collector and the process chamber constitute a closed circuit.
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