Importance

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Abstract

A semiconductor equipment control system and method is provided. The semiconductor equipment control system preferably includes semiconductor equipment having a process recipe stored therein and a host connected to the semiconductor equipment through a network. The host preferably includes a database in which a reference recipe is stored and is preferably configured to receive and compare a final modification time of the process recipe with a final modification time of the reference recipe. When the final modifications times are equal, the host is preferably configured to instruct the semiconductor equipment to perform a process according to the process recipe. When the final modification times are different, the host is preferably configured to check a recipe body of the process recipe against a recipe body of the reference recipe to determine if the process recipe is within an established tolerance. If the process recipe is within tolerance, the host may instruct the semiconductor equipment to perform the process according to the process recipe. If the process recipe is not within tolerance, the host preferably interlocks the process. Using this semiconductor equipment and control method, unconditional checking of the process recipe body can be eliminated, thereby resulting in significant time savings and a more efficient manufacturing process.

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First Claim