Method for controlling semiconductor processing equipment in real time
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United States of America Patent
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Jul 18, 2000
Grant Date -
N/A
app pub date -
Sep 4, 1998
filing date -
Dec 5, 1997
priority date (Note) -
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Abstract
A method for controlling semiconductor processing equipment in real time, includes measuring a characteristic value of a product of a first process performed by a first piece of equipment. Then it is determined whether the characteristic value of the product is within a predetermined acceptable product range stored in a host computer. A second process is stopped from operating on the product when the product is not within the range. Otherwise, when the product is within range, the process is tested using a main test that includes computing a main statistic using the characteristic value of the product and determining whether the main statistic is within a predetermined control limit range. Then, if the main test is not passed, the process is interrupted, including stopping the first piece of equipment and postponing the second process from operating on the product.
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