Lithographic apparatus and device manufacturing method
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United States of America Patent
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Jan 9, 2007
Grant Date -
Feb 10, 2005
app pub date -
Aug 4, 2004
filing date -
Aug 4, 2003
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A lithographic apparatus having a positioning device that facilitates the maintenance of a conditioned environment, is presented. Embodiments of the invention include a combination of a first drive unit and a second drive unit for positioning an object table in a lithographic apparatus. The first drive unit has a first part connected to the object table and a second part connected to a first part of the second drive unit. First and second part of the first drive unit are separated from each other by a wall. Maintaining a conditioned environment surrounding the object is thereby facilitated.
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