System and method for dissipating workpiece charge build up

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11864299
APP PUB NO 20230371160A1
SERIAL NO

17740859

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Importance

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Abstract

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A system and method for reducing charge on a workpiece disposed on a platen is disclosed. The system includes an ionizer to generate ionized gas from the source of backside gas. The ionizer may be used to introduce ionized gas into the backside gas channels of the platen. A controller is used to selectively allow backside gas and/or ionized gas into the backside gas channels. In certain embodiments, the platen also includes an exhaust channel in communication with an exhaust valve to ensure that the pressure within the volume between the top surface of the platen and the workpiece is maintained in a desired range. In one embodiment, the system includes a valving system in communication with the source of backside gas and also in communication with the ionizer. In another embodiment, the amount of ionization performed by the ionizer is programmable.

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Patent Owner(s)

  • APPLIED MATERIALS INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Qin South Hamilton, US 72 474
Morrell, David Gloucester, US 12 21
Sun, Dawei Lynnfield, US 46 37

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