Non contacting electro-pneumatic servo for vibration isolation

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United States of America Patent

PATENT NO 4730541
SERIAL NO

06869981

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A sensing system for a vibration isolation table. A sensor responsive to the position of the tabletop is spaced apart from the tabletop and provides an output corresponding to the position of the tabletop. The output is modified to provide a control signal and a valve responsive to the modified signal controls the flow of air into and out of an air isolator which supports the load.

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Patent Owner(s)

  • TECHNICAL MANUFACTURING CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Greene, Geoffrey L Germantown, MD 10 89

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