Imaging apparatus
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United States of America Patent
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Aug 17, 2004
Grant Date -
Feb 13, 2003
app pub date -
Jul 23, 2002
filing date -
Jul 24, 2001
priority date (Note) -
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status (Latency Note)
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Abstract
An imaging apparatus according to one embodiment of the invention includes a programmable patterning structure configured to pattern a projection beam of radiation according to a desired pattern. The programmable patterning structure includes a plurality of separate patterning sub-elements, each sub-element being configured to generate a patterned sub-beam. At least one of the separate patterning sub-elements is configured to generate a patterned sub-beam whose cross-section contains regions of different intensities. The imaging apparatus also includes a combining structure configured to combine the plurality of patterned sub-beams into a single patterned image, and a projection system configured to project the patterned image onto a target portion of a substrate.
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