Bubbler apparatus and delivery method

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 8518484
APP PUB NO 20080182010A1
SERIAL NO

12014270

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Abstract

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This invention relates to vapor phase reagent dispensing apparatus having a bubbler tube and also a metal seal aligned and in contact with the hardened opposing flat surfaces of a top wall member and a protuberance on a side wall member, wherein the hardened opposing flat surfaces of the top wall member and the protuberance have a hardness greater than the hardness of the metal seal. The dispensing apparatus may be used for dispensing of reagents such as precursors for deposition of materials in the manufacture of semiconductor materials and devices.

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Patent Owner(s)

  • PRAXAIR TECHNOLOGY, INC.

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Peters, David Walter Kingsland, US 16 334
Spohn, Ronald F Getzville, US 17 131

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