Micro-electro-mechanical RF switch
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United States of America Patent
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Apr 5, 2005
Grant Date -
Nov 20, 2003
app pub date -
May 17, 2002
filing date -
May 17, 2002
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A microelectromechanical switch including: at least one pair of actuator electrodes; at least one input electrode and at least one output electrode for input and output, respectively, of a radio frequency signal; and a beam movable by an attraction between the at least one pair of actuator electrodes, the movable beam having at least a portion electrically connected to the at least one input electrode and to the at least one output electrode when moved by the attraction between the at least one pair of actuator electrodes to make an electrical connection between the at least one input and output electrodes; wherein the at least one pair of actuator electrodes are electrically isolated from each of the at least one input and output electrodes. The microelectromechanical switch can be configured in single or multiple-poles and/or single or multiple throws.
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