Method for fabricating liquid crystal display device
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United States of America Patent
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Apr 15, 2008
Grant Date -
Jun 23, 2005
app pub date -
Sep 28, 2004
filing date -
Apr 1, 2003
priority date (Note) -
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Abstract
In etching a metal line formed as a dual layer of aluminum alloy and molybdenum, the metal line consisting of the dual layer of aluminum alloy and molybdenum is etched through one-time wet etching by applying the etchant including HNO.sub.3, HClO.sub.4, a Ferric compound (Fe.sup.3+), and a Flouro compound (F.sup.-), the process can be reduced and a metal line having a good profile can be formed.
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