Detector objective lens
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United States of America Patent
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Apr 20, 1999
Grant Date -
N/A
app pub date -
Jun 18, 1997
filing date -
Jul 25, 1996
priority date (Note) -
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status (Latency Note)
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Abstract
The invention relates to a detector objective lens and a charged particle am device with such a detector objective lens containing a main lens for focussing a charged particle beam on a specimen, which consists of a magnetic lens (60) and an electrostatic lens (61) and a detector (62) disposed in front of the magnetic lens (60) in the direction of the charged particle beam (2) for detecting the charged particles released at the specimen (8). An additional lens is provided for influencing the released charged particles, which generates an electrostatic and/or magnetic field and is disposed between the main lens and the detector, the fields of the main lens and said additional lens being substantially separated from each other.
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