Phase control in contact formation

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11410880
APP PUB NO 20200343135A1
SERIAL NO

16392067

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method includes forming a first metallic feature, forming a dielectric layer over the first metallic feature, etching the dielectric layer to form an opening, with a top surface of the first metallic feature being exposed through the opening, and performing a first treatment on the top surface of the first metallic feature. The first treatment is performed through the opening, and the first treatment is performed using a first process gas. After the first treatment, a second treatment is performed through the opening, and the second treatment is performed using a second process gas different from the first process gas. A second metallic feature is deposited in the opening.

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Patent Owner(s)

  • TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chang, Chih-Wei Hsinchu, TW 342 1158
Chen, I-Li Hsinchu, TW 7 21
Chen, Pin-Wen Keelung, TW 26 67
Hsu, Yuan-Chen Hsinchu, TW 5 15
Huang, Chun-Hsien Hsinchu, TW 100 285
Lin, Wei-Jung Hsinchu, TW 70 195
Tsai, Ming-Hsing Chu-Pei, TW 128 1687

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