Semiconductor devices including support pattern and methods of fabricating the same

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11348996
APP PUB NO 20210043722A1
SERIAL NO

16860136

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Abstract

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Disclosed are semiconductor devices including support patterns and methods of fabricating the same. The semiconductor devices may include a plurality of vertical structures on a substrate and a support pattern that contacts sidewalls of the plurality of vertical structures. The support pattern may include a plurality of support holes extending through the support pattern. The plurality of support holes may include a first support hole and a second support hole that are spaced apart from each other, and the first support hole may have a shape or size different from a shape or size of the second support hole.

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Patent Owner(s)

  • SAMSUNG ELECTRONICS CO., LTD.

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cho, Jae-Hwan Suwon-si, KR 4 0
Hwang, Yoosang Yongin-si, KR 116 685
Lee, Sangho Hwaseong-si, KR 218 1508

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