Wafer carrying system and carrying method thereof
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
Apr 15, 2003
Grant Date -
Feb 7, 2002
app pub date -
May 3, 2001
filing date -
Jul 28, 2000
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A wafer carrying system includes an intermediate cassette device having a plurality of wafer support holders, a robot arm device to carry wafers, an aligner unit to align the wafers, and a wafer feed and storage cassette. The wafers held by the robot arm device are transferred to the aligner unit are aligned in the intermediate cassette device, and are then directly delivered from the aligner unit to the wafer support holders of the intermediate cassette device.
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