Semiconductor inspecting method for ensuring scrubbing length on pad

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United States of America Patent

PATENT NO 11703541
SERIAL NO

17524788

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Abstract

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A semiconductor inspecting method for ensuring a scrubbing length on a pad includes following steps. First off, a first position of a probe needle from above is defined. In addition, a wafer comprising at least a pad is placed on a wafer chuck of a semiconductor inspecting system. Thereafter, a relative vertical movement between the probe needle and the pad is made by adopting a driving system of the semiconductor inspecting system to generate a scrubbing length on the pad. Next, whether the scrubbing length is equal to or larger than a preset value or not is recognized by adopting the vision system and the relative vertical movement is stopped by adopting the driving system.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Chien-Hung Hsinchu Hsiang, TW 378 1458
Fehrmann, Frank Dresden, DE 11 27
Giessmann, Sebastian Dresden, DE 15 12
Hansel, Volker Coswig, DE 4 4

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