System and method for verifying process procedures in a manufacturing environment
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United States of America Patent
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Apr 24, 2001
Grant Date -
N/A
app pub date -
Jun 9, 1997
filing date -
Jun 7, 1996
priority date (Note) -
Expired
status (Latency Note)
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Abstract
In a process procedure verifying system for the manufacturing of a semiconductor device, a process procedure inputted through an input and display device and stored in a temporary memory, is verified by using a knowledge data prepared on the basis of data stored in a product information memory and an equipment information memory. Thus, the process procedure can be verified with no intervention of experience and perception of a human being, and without concentrating a load to a limited equipment, with the result that production efficiency and reliability can be elevated.
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