Process for fabrication of high reflectors by reversal of layer sequence and application thereof

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United States of America Patent

PATENT NO 7190524
APP PUB NO 20050063061A1
SERIAL NO

10917209

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Abstract

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An optical reflector includes an optical reflective element that comprises alternating layers of high and low index layers. A new substrate is bonded on the optical reflective element. The sequence of layers in the reflective element is reversed in order such that the layers grown first with lowest surface roughness are exposed to the highest electric field strength, and the layer grown last, of highest roughness, are buried deep in the multilayer stack.

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Patent Owner(s)

  • MASSACHUSETTS INSTITUTE OF TECHNOLOGY

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Akiyama, Shoji Annaka, JP 178 1551
Grawert, Felix Jan Cambridge, MA 2 39
Kaertner, Franz X Newton, MA 29 304
Wada, Kazumi Lexington, MA 47 895

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