Organic/inorganic thin film deposition method
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United States of America Patent
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Sep 21, 2010
Grant Date -
Jun 12, 2008
app pub date -
Dec 5, 2007
filing date -
Dec 7, 2006
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Abstract
Provided is a method for depositing an organic/inorganic thin film. The method includes: i) heating a source vessel containing an organic material and an inorganic material; ii) transferring a deposition gas to a process chamber; iii) distributing the deposition gas onto a substrate disposed in the process chamber; iv) purging the process chamber; v) heating an activating agent source vessel; vi) transferring a heat initiator gas phase to the process chamber; vii) distributing the heat initiator gas phase onto the organic or inorganic material monomer deposited on the substrate through the process chamber, and forming an organic/inorganic thin film; and viii) exhausting the heat initiator gas phase and purging the process chamber. Depositing the organic/inorganic thin film in a time-division manner, the thickness of the thin film can be accurately adjusted and the deposition can be uniformly performed when the thin film is deposited on a large-scale substrate.
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- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
- ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
International Classification(s)
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Ahn, Seong Deok | Daejeon, KR | 26 | 220 |
Baek, Kyu Ha | Daejeon, KR | 32 | 314 |
Kang, Seung Youl | Daejeon, KR | 87 | 1106 |
Kim, Chul Am | Seoul, KR | 30 | 267 |
Kim, Gi Heon | Daejeon, KR | 64 | 285 |
Oh, Ji Young | Daejeon, KR | 34 | 192 |
Suh, Kyung Soo | Daejeon, KR | 45 | 469 |
You, In Kyu | Daejeon, KR | 24 | 198 |
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Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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