Process for producing structures in resist layers using ultrasonic irradiation
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Sep 16, 1986
Grant Date -
N/A
app pub date -
May 13, 1985
filing date -
May 21, 1984
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A process for the production of structures by the polymerization, or fragmentation of resist layers comprising the steps of effecting an incomplete exposure of the resist layer corresponding to the pattern of the structures, and of fully developing the structure in the resist layer by ultrasonic irradiation. An acoustic microscope is preferably used for the ultrasonic irradiation, whereby the formation of the structure in the resist layer may also be observed.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully