Guiding device

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11947264
APP PUB NO 20220229372A1
SERIAL NO

17608505

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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An actuator, configured to move a first object with respect to a second object, that includes a first body having an annular ring, a second body, arranged movably with respect to the first body, having a longitudinal shaft at least partially disposed within the annular ring, and at least one spring device, arranged between the first body and the second body, wherein the at least one spring device is configured to guide relative movements between the first body and the second body in a range of movement, and the at least one spring device has two or more leaf springs, wherein each of the two or more leaf springs is connected to the first body and to the second body, and wherein at least one of the leaf springs is in a non-planar state when the spring device is in an equilibrium position.

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First Claim

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Patent Owner(s)

  • ASML NETHERLANDS B.V.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Boogaard, Gerard Johannes Zaltbommel, NL 2 0
Limpens, Patrick Willem Paul Uden, NL 7 15
Walters, Michaël Johannes Anna Maria Eindhoven, NL 1 0

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