Capacitive pressure sensor with vertical electrical feedthroughs and method to make the same
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United States of America Patent
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Jul 23, 2013
Grant Date -
Nov 10, 2011
app pub date -
May 5, 2010
filing date -
May 5, 2010
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Abstract
A sensing device capable of detecting pressure using micro-electro-mechanical system (“MEMS”) capacitive pressure sensor with vertical electric feed-through is disclosed. The sensing device includes a first sensing element, a second sensing element, and a sensing circuit. In one embodiment, the first sensing element is disposed over a semiconductor die and is configured to generate a first sensing signal upon detecting pressure. The second sensing element is also disposed over the semiconductor die adjacent to the first sensing element, and is configured to generate a second sensing signal upon sensing ambient conditions. The sensing circuit is capable of generating a pressure sensing signal in response to the first sensing signal and the second sensing signal.
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