Optical linear encoder with light quantity calabration

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United States of America Patent

PATENT NO 5066129
SERIAL NO

07574290

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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In an averaged diffraction moire position detector of the present invention, diffracted lights which have passed through the same places as those through which measuring diffracted lights have passed are used for monitoring a quantity of light. Therefore, change in the quantity of light of a light source and change in the transmittance of diffraction gratings can be suitably corrected.

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Patent Owner(s)

  • KABUSHIKI KAISHA OKUMA TEKKOSHO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Matsui, Keiji Miwa, JP 12 164

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