Filtering device, purification device, and method for manufacturing chemical liquid
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United States of America Patent
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Sep 19, 2023
Grant Date -
Nov 26, 2020
app pub date -
Aug 13, 2020
filing date -
Mar 22, 2018
priority date (Note) -
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status (Latency Note)
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Abstract
A filtering device for obtaining a chemical liquid by purifying a liquid to be purified has an inlet portion, an outlet portion, a filter A, at least one filter B different from the filter A, and a flow path which includes the filter A and the filter B arranged in series between the inlet portion and the outlet portion and extends from the inlet portion to the outlet portion, in which the filter A has a porous base material made of polyfluorocarbon and a coating layer which is disposed to cover the porous base material and contains a first resin having a hydrophilic group.
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