Thermoelectric sensor
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United States of America Patent
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-
Mar 21, 2000
Grant Date -
N/A
app pub date -
Feb 25, 1998
filing date -
Feb 28, 1997
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Thermoelectric sensor (12) formed by a membrane (14) including a plurality of thermoelectric elements (20) formed of a plurality of thermoelectric couples and forming a plurality of elementary cells. Each elementary cell is thermally insulated from adjacent elementary cells by metal wires (22, 23), preferably gold wires, arranged on the front face (25) of the membrane (14), more particularly, on an upper passivation layer (30). The metal wires (22 and 23) are thermally connected to a substrate (16) supporting said membrane. The two wires separating two adjacent thermoelectric elements (20) are separated from each other by an intermediate low thermal conduction region (28).
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