Formation of protective coatings for color filters

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United States of America Patent

PATENT NO 6603510
APP PUB NO 20030142226A1
SERIAL NO

08986361

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Abstract

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A structure and method for producing color filters with a protective silation layer is described. In one embodiment, each filter is coated with a silation layer to prevent bleeding of material between closely spaced filters during the fabrication process. In a second embodiment, the silation layer is used to protect an array of filters from physical damage during detaping operations. In a third embodiment, the silation layer is used before fabrication later filters in a color filter array to prevent damage to previous filter layers.

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Patent Owner(s)

  • INTEL CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Wester, Neil Tempe, AZ 7 40

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