Bottom conductor for integrated MRAM

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 7265404
APP PUB NO 20070045758A1
SERIAL NO

11215276

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Abstract

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A structure that is well suited to connecting an MTJ device to a CMOS integrated circuit is described. It is built out of three layers. The bottom layer serves as a seed layer for the center layer, which is alpha tantalum, while the third, topmost, layer is selected for its smoothness, its compatibility with the inter-layer dielectric materials, and its ability to protect the underlying tantalum. A method for its formation is also described.

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Patent Owner(s)

  • HEADWAY TECHNOLOGIES, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cao, Wei San Jose, CA 235 2289
Chien, Chen-Jung Sunnyvale, CA 50 652
Hong, Liubo San Jose, CA 77 5081
Horng, Cheng San Jose, CA 32 653
Tong, Ruying Los Gatos, CA 2 13
Torng, Chyu-Jiuh Pleasanton, CA 109 2307

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