Vacuum chamber AC/DC probe
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United States of America Patent
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Feb 9, 2010
Grant Date -
N/A
app pub date -
Aug 17, 2007
filing date -
Apr 9, 2007
priority date (Note) -
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Abstract
Features of non-vacuum AC/DC probe systems are combined with features of the DC vacuum chamber testers to provide an AC/DC probe system that can be used in a vacuum environment, such as a SEM vacuum chamber. Features of the DC vacuum chamber tester are modified to include new op-amp circuitry that provides the AC/DC testing functionality of the non-vacuum chamber systems, resulting in an AC/DC probe system that can be used in a vacuum environment.
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