Ion source with gas delivery for high-fidelity analysis

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United States of America Patent

PATENT NO 11768176
APP PUB NO 20230213479A1
SERIAL NO

17647239

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Abstract

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In a system for processing gas, a gas analyzer in a gas analyzer chamber measures a quantity of ions generated from a gas. An ionization source includes an ionization chamber and an electron source for generating ions for the gas analyzer. The ionization chamber encompasses an ionization region in which particles of the gas are charged to form the ions. A channel directs the gas from a gas source into the ionization chamber, and the channel extends to a surface of the ionization chamber. An ionization source vacuum pump is in gaseous communication with the ionization chamber via a substantially large opening, and operates to draw gas from the ionization chamber.

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Patent Owner(s)

  • MKS INSTRUMENTS, INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Blessing, James Edward Morgan Hill, US 2 0

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