Waveguide structures
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United States of America Patent
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Oct 22, 2002
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N/A
app pub date -
Feb 1, 2000
filing date -
Feb 1, 2000
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Abstract
A waveguide for optical transmission having a mechanically active core material comprised of a silicon-rich silicon nitride in a mechanically active region. In the mechanically active region, the silicon-rich silicon nitride core can have no cladding (ie. an air cladding) or a cladding comprised of a silicon nitride over at least a portion thereof. The silicon-rich silicon nitride core is comprised of a silicon nitride compound having a ratio of silicon to nitrogen atoms greater than that of stoichiometric silicon nitride, Si.sub.3 N.sub.4.
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