Film forming apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11551918
APP PUB NO 20200381226A1
SERIAL NO

16883543

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A film forming apparatus includes: a processing container; a substrate holder that holds the substrate in the processing container; and a target assembly disposed in an upper side of the substrate holder. The target assembly includes: a target made of metal, including a main body and a flange provided around the main body, and emitting sputter particles from the main body; a target holder including a target electrode configured to supply power to the target, and holding the target; a target clamp that clamps the flange of the target to the target holder; and an anti-deposition shield provided around the main body of the target to cover the flange, the target clamp, and the target holder, and having a labyrinth structure in which an inner tip end thereof is disposed to enter a recess between the main body of the target and the target clamp.

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Patent Owner(s)

  • TOKYO ELECTRON LIMITED

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gomi, Atsushi Yamanashi, JP 70 2672
Imakita, Kenichi Yamanashi, JP 8 18
Kojima, Yasuhiko Yamanashi, JP 99 1309
Sone, Hiroshi Tokyo, JP 25 172
Yokohara, Hiroyuki Yamanashi, JP 11 7

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