Silicone-based adhesive sheet, multilayer structure including same, and method for producing semiconductor device
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United States of America Patent
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Mar 26, 2024
Grant Date -
Oct 29, 2020
app pub date -
Dec 19, 2018
filing date -
Dec 20, 2017
priority date (Note) -
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status (Latency Note)
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Abstract
Provided is: a layered body wherein a sheet surface has slight adhesiveness, enabling easy temporary securing of a semiconductor chip, or the like, that has been diced, onto a semiconductor substrate, and wherein permanent adhesion to an adhered object is expressed through post-curing; a layered body that includes the same; a semiconductor device that uses the same; and a method for manufacturing the semiconductor device. A silicone-based adhesive sheet is disclosed herein, wherein, prior to heating, the delamination mode of the adhesive surface from a non-adhesive substrate is interfacial delamination, and after heating of the adhesive surface in a range of between 50 and 200° C., the delamination mode of the adhesive surface from another non-adhesive substrate changes to cohesive fracturing, and exhibits permanent adhesion.
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