Secondary process controller for supplementing a primary process controller
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United States of America Patent
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Aug 7, 2007
Grant Date -
May 27, 2004
app pub date -
Nov 21, 2002
filing date -
Nov 21, 2002
priority date (Note) -
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status (Latency Note)
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Abstract
A method and an apparatus for implementing a multi-variate process control system. A workpiece is processed using a primary process control function during a first time period. A secondary process control function is performed during at least a portion of the first time period for processing of the workpiece. The secondary process control function is capable of modifying at least one secondary control parameter.
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