Technique for shaping a ribbon-shaped ion beam
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United States of America Patent
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Mar 9, 2010
Grant Date -
May 17, 2007
app pub date -
Sep 29, 2006
filing date -
Nov 15, 2005
priority date (Note) -
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Abstract
A technique for shaping a ribbon-shaped ion beam is disclosed. In one particular exemplary embodiment, the technique may be realized as an apparatus for shaping a ribbon-shaped ion beam. The apparatus may comprise an electrostatic lens having a substantially rectangular aperture for a ribbon-shaped ion beam to pass through, wherein a plurality of focusing elements are positioned along short edges of the aperture, and wherein each focusing element is separately biased and oriented to shape the ribbon-shaped ion beam.
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