Multi-wafer polishing tool
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United States of America Patent
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-
Feb 13, 2001
Grant Date -
N/A
app pub date -
Dec 4, 1998
filing date -
Dec 4, 1998
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A wafer polishing tool is disclosed which includes a polishing platen which is rotatable about a central platen axis, and a wafer carrier which supports a wafer for rotational movement to cause a portion of a surface of the wafer to only intermittently contact a polishing surface of the platen while the wafer rotates. The polishing tool may include a plurality of vertically stacked polishing platens which are rotatable about a central platen axis, and a plurality of stacked wafer carriers, wherein each carrier supports a wafer for rotational movement and vertical movement into contact with one of the polishing platens. During polishing, the carrier pack maintains the wafers in uninterrupted contact with the platen over less than entire surfaces of the wafers.
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