Charged particle beam apparatus
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United States of America Patent
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Nov 11, 2008
Grant Date -
Jul 5, 2007
app pub date -
Mar 12, 2007
filing date -
Jul 30, 2003
priority date (Note) -
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status (Latency Note)
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Abstract
The charged particle beams is provided, which can analyze contamination of the inner wall of the system without being disassembled and supply information on appropriate maintenance timing. The contamination level of the inner wall of the system is identified by measuring the spectrum of the X-rays emitted from the inner wall due to irradiation of a charged particle beam or a recoil electron.
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