Surface configuration measuring method
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United States of America Patent
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-
Nov 26, 2002
Grant Date -
N/A
app pub date -
Jul 24, 2000
filing date -
Jul 23, 1999
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A surface configuration measuring method is provided, the surface configuration measuring method being characterized in having the steps of: moving a touch signal probe by a command velocity vector to touch a surface of the workpiece to be measured; scanning the surface of the workpiece to be measured, the touch signal probe being moved along the surface to be measured while controlling the distance relative to the surface to be measured so that detected amplitude value of a detection signal outputted by the detecting circuit becomes a predetermined reference value, thus outputting the detected amplitude value and corresponding measuring position; and calculating an estimated surface position based on the detected amplitude value and the measuring position estimated to be obtained when surface is scanned to keep the detected amplitude value constant.
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