Method for manufacturing ceramic green sheet and method for manufacturing electronic part using that ceramic green sheet
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United States of America Patent
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Feb 5, 2008
Grant Date -
Mar 3, 2005
app pub date -
Aug 26, 2004
filing date -
Aug 28, 2003
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The invention relates to a so-called ceramic green sheet used for manufacturing multilayer ceramic electronic parts. The invention is directed to formation of an insulating layer or a like layer having a complex shape with concavities and convexities while maintaining accuracy in its shape, accuracy in its formation position and uniformity in its thickness. In a process according to the invention, a layer made of a photosensitive material including a powder having a desired electric characteristic is formed on a light transmissive base member. Light such as ultraviolet light having a first pattern is radiated to the photosensitive material from the back side of the base member and light such as ultraviolet light having a second pattern is radiated to the photosensitive material from the back side of the base member so that the photosensitive material is exposed. Then the photosensitive layer after the exposure is subjected to development.
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