Piezoelectric thin film device and method for manufacturing the same

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United States of America Patent

PATENT NO 7323805
APP PUB NO 20050184627A1
SERIAL NO

11043257

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A piezoelectric thin film device includes an amorphous metal film disposed on a substrate and a piezoelectric film disposed on the amorphous metal. One of crystal axis of the piezoelectric film is aligned in a direction perpendicular to a surface of the amorphous metal.

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Patent Owner(s)

  • KABUSHIKI KAISHA TOSHIBA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Abe, Kazuhide Kawasaki, JP 96 1729
Hasunuma, Masahiko Yokohama, JP 59 978
Itaya, Kazuhiko Yokohama, JP 83 1989
Kawakubo, Takashi Yokohama, JP 82 2025
Nagano, Toshihiko Kawasaki, JP 43 811
Nishigaki, Michihiko Kawasaki, JP 60 767
Ohara, Ryoichi Yokohama, JP 41 717
Sano, Kenya Kawasaki, JP 35 757
Shibata, Hironobu Edogawa-ku, JP 23 255
Toyoda, Hiroshi Kamakura, JP 87 844
Yanase, Naoko Kawasaki, JP 32 447
Yasumoto, Takaaki Kawasaki, JP 45 776

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