Silicon carbide semiconductor device and method of manufacturing the same
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United States of America Patent
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Nov 5, 2013
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app pub date -
Dec 22, 2010
filing date -
Dec 25, 2009
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Abstract
A silicon carbide semiconductor device having a JFET or a MOSFET includes a semiconductor substrate and a trench. The semiconductor substrate has a silicon carbide substrate, a drift layer on the silicon carbide substrate, a first gate region on the drift layer, and a source region on the first gate region. The trench has a strip shape with a longitudinal direction and reaches the drift layer by penetrating the source region and the first gate region. The trench is filled with a channel layer and a second gate region on the channel layer. The source region is not located at an end portion of the trench in the longitudinal direction.
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