Method for forming a liquid film on a substrate
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United States of America Patent
Stats
-
Dec 30, 2003
Grant Date -
Mar 6, 2003
app pub date -
May 14, 2002
filing date -
Sep 27, 1999
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A liquid film forming method of dropping a liquid from a dropping nozzle or dropping nozzles of a dropping unit onto a substrate to be processed, and then providing relative movement between the dropping unit and the substrate while keeping the liquid dropping on the substrate, so as to form a liquid film on the substrate
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Cited Art Landscape
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