Method and system for operating an air gauge at programmable or constant standoff

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 7797985
APP PUB NO 20090000354A1
SERIAL NO

12209487

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Provided are a methods and systems for determining a topography of an object. In an embodiment, a system includes a reference probe configured to measure a surface of a reference surface and to generate a reference signal, a measuring probe configured to measure a surface of an object and to generate a measurement signal, a sensor configured to sense a position of the measuring probe and to generate a sensor signal, and a combiner configured to receive the sensor signal and the measurement signal and to generate a combination signal therefrom. A desired distance between the measuring probe and the object is substantially maintained by adjusting the position of the measuring probe based on the measurement signal. A topography of the object is determined based at least on a comparison of the reference signal and the combination signal.

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Patent Owner(s)

  • ASML HOLDING N.V.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gajdeczko, Boguslaw F Princeton, US 4 26
Galburt, Daniel N Wilton, US 40 602

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