Three wavelength quantitative imaging systems
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United States of America Patent
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Jul 12, 2011
Grant Date -
Sep 16, 2010
app pub date -
Mar 16, 2009
filing date -
Mar 16, 2009
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Abstract
An optical system includes more than two optical interferometers that generate interference phenomena between optical waves to measure a plurality of distances, a plurality of thicknesses, and a plurality of indices of refraction of a sample. An electromagnetic detector receives an output of the optical interferometers to render a magnified image of at least a portion of the sample. A controller reduces or eliminates undesired optical signals through a hierarchical phase unwrapping of the output of the electromagnetic detector.
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