Method of making a semiconductor device

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United States of America Patent

PATENT NO 6096582
SERIAL NO

08898992

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Abstract

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A method of making a semiconductor device is disclosed in which the device has an insulated gate transistor in which source and drain regions are provided in a single crystal semiconductor layer formed on an insulating layer with a channel region interposed between the source and drain regions. The insulating layers just below the source and drain regions are made thicker than an insulating layer just below the channel region. The method uses substrate bonding to achieve the device.

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Patent Owner(s)

  • CANON KABUSHIKI KAISHA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Inoue, Shunsuke Yokohama, JP 64 2421
Kohchi, Tetsunobu Hiratsuka, JP 19 564
Miyawaki, Mamoru Isehara, JP 142 4370

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