Capacitor array and method for forming the same
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United States of America Patent
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Mar 14, 2023
Grant Date -
N/A
app pub date -
Oct 8, 2021
filing date -
Oct 8, 2021
priority date (Note) -
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status (Latency Note)
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Abstract
A capacitor array includes a substrate, first pedestal container stacked capacitors, second pedestal container stacked capacitors, and third pedestal container stacked capacitors. The first pedestal container stacked capacitors extend upwardly from above the substrate and are arranged in a first row. The second pedestal container stacked capacitors extend upwardly from above the substrate and are arranged in a second row next to the first row. The third pedestal container stacked capacitors extend upwardly from above the substrate and are arranged in a third row next to the second row. A first distance between the first and second rows is less than a second distance between the second and third rows.
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