Apparatus and method for inspecting a semiconductor component
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United States of America Patent
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Sep 11, 2007
Grant Date -
Oct 6, 2005
app pub date -
Mar 10, 2005
filing date -
Mar 30, 2004
priority date (Note) -
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Abstract
Examination devices and methods operating with incident light have hitherto been used for the examination of wafers. To allow these devices also to be used with the transmitted-light method, it is proposed to configure the substrate holder (16) so that an illumination device (38, 40, 42) is integrated into the substrate holder (16) in such a way that transmitted-light illumination of the wafer (18) is possible.
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