Enhanced integrity projection lens assembly

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 8362441
APP PUB NO 20110084220A1
SERIAL NO

12901468

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The present invention relates to a projection lens assembly module for directing a multitude of charged particle beamlets onto an image plane located in a downstream direction, and a method for assembling such a projection lens assembly. In particular the present invention discloses a modular projection lens assembly with enhanced structural integrity and/or increased placement precision of its most downstream electrode.

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Patent Owner(s)

  • MAPPER LITHOGRAPHY IP B.V.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Koning, Johan Joost The Hague, NL 17 184
Schipper, Bart Nijkerk, NL 6 68
Steenbrink, Stijn Willem Herman The Hague, NL 4 62

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