Teos seaming scribe line monitor
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United States of America Patent
Stats
-
Jan 7, 2003
Grant Date -
N/A
app pub date -
Apr 18, 2001
filing date -
Apr 18, 2001
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Various embodiments of a circuit device for detecting the presence of unwanted conductor structures in insulation structure seams and methods of making the same are provided. In one aspect, a circuit device is provided that includes an insulating structure positioned on a substrate and a first conductor structure that has a first member positioned on the insulating structure. A second conductor structure is provided that has a second member positioned on the insulating structure. The second member projects toward the first conductor structure and the first member projects toward the second conductor structure, but the first and second conductor structures are not in physical contact. A current flowing between the first and second conductor structures when a bias is applied between the first and second conductor structures is indicative of a third conductor structure present on the insulating structure and contacting the first and second members.
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